pwiDB

Plasma-Surface Interaction Data Set 465

Sputtering of Ar⁺ on Re(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Re(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.23	0.0
	37.98	0.0002214
	44.75	0.001326
	52.73	0.004331
	62.13	0.01096
	73.21	0.02382
	86.26	0.0463
	101.6	0.08169
	119.8	0.1317
	141.1	0.1948
	166.3	0.2669
	195.9	0.3428
	230.9	0.4185
	272.0	0.4922
	320.5	0.5639
	377.7	0.6344
	445.1	0.7047
	524.4	0.7759
	617.9	0.8488
	728.1	0.924
	857.9	1.002
	1011.0	1.083
	1191.0	1.167
	1404.0	1.255
	1654.0	1.345
	1949.0	1.439
	2296.0	1.535
	2706.0	1.634
	3188.0	1.735
	3757.0	1.837
	4426.0	1.941
	5216.0	2.045
	6146.0	2.15
	7242.0	2.254
	8533.0	2.356
	10050.0	2.456
	11850.0	2.554
	13960.0	2.648
	16450.0	2.737
	19380.0	2.821
	22840.0	2.899
	26910.0	2.969
	31710.0	3.031
	37360.0	3.083
	44020.0	3.125
	51880.0	3.156
	61130.0	3.174
	72020.0	3.179
	84870.0	3.171

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0922
q = 8.13
mu = 2.096
epsilonL = 3.996e-06
Eth = 32.23

Fit range

E = 32.23 – 100000