{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"32.23": {"P": 0}, "37.98": {"P": 0.0002214}, "44.75": {"P": 0.001326}, "52.73": {"P": 0.004331}, "62.13": {"P": 0.01096}, "73.21": {"P": 0.02382}, "86.26": {"P": 0.0463}, "101.6": {"P": 0.08169}, "119.8": {"P": 0.1317}, "141.1": {"P": 0.1948}, "166.3": {"P": 0.2669}, "195.9": {"P": 0.3428}, "230.9": {"P": 0.4185}, "272.0": {"P": 0.4922}, "320.5": {"P": 0.5639}, "377.7": {"P": 0.6344}, "445.1": {"P": 0.7047}, "524.4": {"P": 0.7759}, "617.9": {"P": 0.8488}, "728.1": {"P": 0.924}, "857.9": {"P": 1.002}, "1011.0": {"P": 1.083}, "1191.0": {"P": 1.167}, "1404.0": {"P": 1.255}, "1654.0": {"P": 1.345}, "1949.0": {"P": 1.439}, "2296.0": {"P": 1.535}, "2706.0": {"P": 1.634}, "3188.0": {"P": 1.735}, "3757.0": {"P": 1.837}, "4426.0": {"P": 1.941}, "5216.0": {"P": 2.045}, "6146.0": {"P": 2.15}, "7242.0": {"P": 2.254}, "8533.0": {"P": 2.356}, "10050.0": {"P": 2.456}, "11850.0": {"P": 2.554}, "13960.0": {"P": 2.648}, "16450.0": {"P": 2.737}, "19380.0": {"P": 2.821}, "22840.0": {"P": 2.899}, "26910.0": {"P": 2.969}, "31710.0": {"P": 3.031}, "37360.0": {"P": 3.083}, "44020.0": {"P": 3.125}, "51880.0": {"P": 3.156}, "61130.0": {"P": 3.174}, "72020.0": {"P": 3.179}, "84870.0": {"P": 3.171}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0922, "q": 8.13, "mu": 2.096, "epsilonL": 3.996e-06, "Eth": 32.23}, "E_min": 32.23, "E_max": 100000}}]}