{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0922, "q": 8.13, "mu": 2.096, "epsilonL": 3.996e-06, "Eth": 32.23}, "E_min": 32.23, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.23	0.0	
37.98	0.0002214	
44.75	0.001326	
52.73	0.004331	
62.13	0.01096	
73.21	0.02382	
86.26	0.0463	
101.6	0.08169	
119.8	0.1317	
141.1	0.1948	
166.3	0.2669	
195.9	0.3428	
230.9	0.4185	
272.0	0.4922	
320.5	0.5639	
377.7	0.6344	
445.1	0.7047	
524.4	0.7759	
617.9	0.8488	
728.1	0.924	
857.9	1.002	
1011.0	1.083	
1191.0	1.167	
1404.0	1.255	
1654.0	1.345	
1949.0	1.439	
2296.0	1.535	
2706.0	1.634	
3188.0	1.735	
3757.0	1.837	
4426.0	1.941	
5216.0	2.045	
6146.0	2.15	
7242.0	2.254	
8533.0	2.356	
10050.0	2.456	
11850.0	2.554	
13960.0	2.648	
16450.0	2.737	
19380.0	2.821	
22840.0	2.899	
26910.0	2.969	
31710.0	3.031	
37360.0	3.083	
44020.0	3.125	
51880.0	3.156	
61130.0	3.174	
72020.0	3.179	
84870.0	3.171	
-----