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Plasma-Surface Interaction Data Set 459

Sputtering of H+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
410.80.0
459.51.244e-05
514.04.53e-05
575.00.0001036
643.30.0001945
719.60.0003253
805.00.0005015
900.50.0007247
1007.00.0009906
1127.00.001289
1261.00.001602
1410.00.001914
1578.00.002207
1765.00.002469
1974.00.002694
2209.00.002879
2471.00.003026
2764.00.003138
3092.00.003219
3459.00.003275
3869.00.003307
4328.00.003321
4842.00.003317
5417.00.0033
6060.00.003269
6779.00.003227
7583.00.003176
8483.00.003115
9490.00.003047
10620.00.002971
11880.00.00289
13280.00.002803
14860.00.002711
16620.00.002616
18600.00.002518
20800.00.002417
23270.00.002315
26040.00.002212
29130.00.002108
32580.00.002005
36450.00.001903
40770.00.001803
45610.00.001704
51030.00.001608
57080.00.001514
63850.00.001423
71430.00.001336
79910.00.001251
89390.00.001171

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 410.8 – 100000