{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"410.8": {"P": 0}, "459.5": {"P": 1.244e-05}, "514.0": {"P": 4.53e-05}, "575.0": {"P": 0.0001036}, "643.3": {"P": 0.0001945}, "719.6": {"P": 0.0003253}, "805.0": {"P": 0.0005015}, "900.5": {"P": 0.0007247}, "1007.0": {"P": 0.0009906}, "1127.0": {"P": 0.001289}, "1261.0": {"P": 0.001602}, "1410.0": {"P": 0.001914}, "1578.0": {"P": 0.002207}, "1765.0": {"P": 0.002469}, "1974.0": {"P": 0.002694}, "2209.0": {"P": 0.002879}, "2471.0": {"P": 0.003026}, "2764.0": {"P": 0.003138}, "3092.0": {"P": 0.003219}, "3459.0": {"P": 0.003275}, "3869.0": {"P": 0.003307}, "4328.0": {"P": 0.003321}, "4842.0": {"P": 0.003317}, "5417.0": {"P": 0.0033}, "6060.0": {"P": 0.003269}, "6779.0": {"P": 0.003227}, "7583.0": {"P": 0.003176}, "8483.0": {"P": 0.003115}, "9490.0": {"P": 0.003047}, "10620.0": {"P": 0.002971}, "11880.0": {"P": 0.00289}, "13280.0": {"P": 0.002803}, "14860.0": {"P": 0.002711}, "16620.0": {"P": 0.002616}, "18600.0": {"P": 0.002518}, "20800.0": {"P": 0.002417}, "23270.0": {"P": 0.002315}, "26040.0": {"P": 0.002212}, "29130.0": {"P": 0.002108}, "32580.0": {"P": 0.002005}, "36450.0": {"P": 0.001903}, "40770.0": {"P": 0.001803}, "45610.0": {"P": 0.001704}, "51030.0": {"P": 0.001608}, "57080.0": {"P": 0.001514}, "63850.0": {"P": 0.001423}, "71430.0": {"P": 0.001336}, "79910.0": {"P": 0.001251}, "89390.0": {"P": 0.001171}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6547, "q": 0.0089, "mu": 1.592, "epsilonL": 9.955e-05, "Eth": 410.8}, "E_min": 410.8, "E_max": 100000}}]}