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Plasma-Surface Interaction Data Set 449

Sputtering of T+ on W(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
153.90.0
175.67.043e-05
200.40.0002624
228.80.0006132
261.10.00117
298.00.001973
340.10.003036
388.20.004337
443.00.005804
505.60.007341
577.10.008845
658.60.01023
751.70.01146
857.90.01251
979.20.01339
1118.00.01411
1275.00.0147
1456.00.01517
1661.00.01554
1896.00.01583
2164.00.01604
2470.00.01618
2819.00.01625
3217.00.01627
3672.00.01622
4191.00.01613
4783.00.01597
5459.00.01577
6230.00.01551
7111.00.0152
8116.00.01485
9262.00.01445
10570.00.01402
12070.00.01355
13770.00.01305
15720.00.01253
17940.00.01198
20470.00.01142
23360.00.01086
26670.00.01028
30430.00.009708
34730.00.009139
39640.00.008578
45250.00.008029
51640.00.007495
58940.00.006979
67260.00.006483
76770.00.006008
87620.00.005555

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 153.9 – 100000