{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"153.9": {"P": 0}, "175.6": {"P": 7.043e-05}, "200.4": {"P": 0.0002624}, "228.8": {"P": 0.0006132}, "261.1": {"P": 0.00117}, "298.0": {"P": 0.001973}, "340.1": {"P": 0.003036}, "388.2": {"P": 0.004337}, "443.0": {"P": 0.005804}, "505.6": {"P": 0.007341}, "577.1": {"P": 0.008845}, "658.6": {"P": 0.01023}, "751.7": {"P": 0.01146}, "857.9": {"P": 0.01251}, "979.2": {"P": 0.01339}, "1118.0": {"P": 0.01411}, "1275.0": {"P": 0.0147}, "1456.0": {"P": 0.01517}, "1661.0": {"P": 0.01554}, "1896.0": {"P": 0.01583}, "2164.0": {"P": 0.01604}, "2470.0": {"P": 0.01618}, "2819.0": {"P": 0.01625}, "3217.0": {"P": 0.01627}, "3672.0": {"P": 0.01622}, "4191.0": {"P": 0.01613}, "4783.0": {"P": 0.01597}, "5459.0": {"P": 0.01577}, "6230.0": {"P": 0.01551}, "7111.0": {"P": 0.0152}, "8116.0": {"P": 0.01485}, "9262.0": {"P": 0.01445}, "10570.0": {"P": 0.01402}, "12070.0": {"P": 0.01355}, "13770.0": {"P": 0.01305}, "15720.0": {"P": 0.01253}, "17940.0": {"P": 0.01198}, "20470.0": {"P": 0.01142}, "23360.0": {"P": 0.01086}, "26670.0": {"P": 0.01028}, "30430.0": {"P": 0.009708}, "34730.0": {"P": 0.009139}, "39640.0": {"P": 0.008578}, "45250.0": {"P": 0.008029}, "51640.0": {"P": 0.007495}, "58940.0": {"P": 0.006979}, "67260.0": {"P": 0.006483}, "76770.0": {"P": 0.006008}, "87620.0": {"P": 0.005555}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.287, "q": 0.0419, "mu": 1.58, "epsilonL": 0.0001002, "Eth": 153.9}, "E_min": 153.9, "E_max": 100000}}]}