{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.287, "q": 0.0419, "mu": 1.58, "epsilonL": 0.0001002, "Eth": 153.9}, "E_min": 153.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
153.9	0.0	
175.6	7.043e-05	
200.4	0.0002624	
228.8	0.0006132	
261.1	0.00117	
298.0	0.001973	
340.1	0.003036	
388.2	0.004337	
443.0	0.005804	
505.6	0.007341	
577.1	0.008845	
658.6	0.01023	
751.7	0.01146	
857.9	0.01251	
979.2	0.01339	
1118.0	0.01411	
1275.0	0.0147	
1456.0	0.01517	
1661.0	0.01554	
1896.0	0.01583	
2164.0	0.01604	
2470.0	0.01618	
2819.0	0.01625	
3217.0	0.01627	
3672.0	0.01622	
4191.0	0.01613	
4783.0	0.01597	
5459.0	0.01577	
6230.0	0.01551	
7111.0	0.0152	
8116.0	0.01485	
9262.0	0.01445	
10570.0	0.01402	
12070.0	0.01355	
13770.0	0.01305	
15720.0	0.01253	
17940.0	0.01198	
20470.0	0.01142	
23360.0	0.01086	
26670.0	0.01028	
30430.0	0.009708	
34730.0	0.009139	
39640.0	0.008578	
45250.0	0.008029	
51640.0	0.007495	
58940.0	0.006979	
67260.0	0.006483	
76770.0	0.006008	
87620.0	0.005555	
-----