Return to search

Plasma-Surface Interaction Data Set 445

Sputtering of Xe+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
42.511.186e-34
49.810.0001287
58.360.0007161
68.380.002235
80.120.005493
93.870.0118
110.00.02314
128.90.04224
151.00.07238
176.90.1167
207.30.1772
242.90.2534
284.60.3425
333.40.4404
390.60.5431
457.70.6479
536.30.7536
628.30.8603
736.20.9689
862.61.081
1011.01.196
1184.01.317
1387.01.444
1626.01.578
1905.01.72
2232.01.869
2615.02.027
3064.02.193
3590.02.369
4206.02.553
4928.02.745
5774.02.946
6765.03.156
7927.03.373
9288.03.597
10880.03.828
12750.04.065
14940.04.307
17500.04.553
20510.04.802
24030.05.052
28150.05.303
32990.05.552
38650.05.799
45290.06.042
53060.06.278
62170.06.507
72840.06.725
85350.06.932

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.51 – 100000