{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"42.51": {"P": 1.186e-34}, "49.81": {"P": 0.0001287}, "58.36": {"P": 0.0007161}, "68.38": {"P": 0.002235}, "80.12": {"P": 0.005493}, "93.87": {"P": 0.0118}, "110.0": {"P": 0.02314}, "128.9": {"P": 0.04224}, "151.0": {"P": 0.07238}, "176.9": {"P": 0.1167}, "207.3": {"P": 0.1772}, "242.9": {"P": 0.2534}, "284.6": {"P": 0.3425}, "333.4": {"P": 0.4404}, "390.6": {"P": 0.5431}, "457.7": {"P": 0.6479}, "536.3": {"P": 0.7536}, "628.3": {"P": 0.8603}, "736.2": {"P": 0.9689}, "862.6": {"P": 1.081}, "1011.0": {"P": 1.196}, "1184.0": {"P": 1.317}, "1387.0": {"P": 1.444}, "1626.0": {"P": 1.578}, "1905.0": {"P": 1.72}, "2232.0": {"P": 1.869}, "2615.0": {"P": 2.027}, "3064.0": {"P": 2.193}, "3590.0": {"P": 2.369}, "4206.0": {"P": 2.553}, "4928.0": {"P": 2.745}, "5774.0": {"P": 2.946}, "6765.0": {"P": 3.156}, "7927.0": {"P": 3.373}, "9288.0": {"P": 3.597}, "10880.0": {"P": 3.828}, "12750.0": {"P": 4.065}, "14940.0": {"P": 4.307}, "17500.0": {"P": 4.553}, "20510.0": {"P": 4.802}, "24030.0": {"P": 5.052}, "28150.0": {"P": 5.303}, "32990.0": {"P": 5.552}, "38650.0": {"P": 5.799}, "45290.0": {"P": 6.042}, "53060.0": {"P": 6.278}, "62170.0": {"P": 6.507}, "72840.0": {"P": 6.725}, "85350.0": {"P": 6.932}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1175, "q": 20.22, "mu": 2.013, "epsilonL": 8.488e-07, "Eth": 42.51}, "E_min": 42.51, "E_max": 100000}}]}