pwiDB

Plasma-Surface Interaction Data Set 444

Sputtering of Kr⁺ on Ta(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Ta(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.5	4.244e-35
	40.6	0.000151
	47.77	0.0008689
	56.21	0.002775
	66.15	0.006939
	77.83	0.01508
	91.58	0.02972
	107.8	0.05407
	126.8	0.09139
	149.2	0.1438
	175.6	0.2111
	206.6	0.2902
	243.1	0.3767
	286.0	0.4664
	336.6	0.5568
	396.0	0.6469
	466.0	0.7371
	548.3	0.8282
	645.2	0.9215
	759.2	1.018
	893.3	1.118
	1051.0	1.224
	1237.0	1.334
	1455.0	1.451
	1712.0	1.573
	2015.0	1.702
	2371.0	1.837
	2790.0	1.979
	3283.0	2.126
	3863.0	2.28
	4545.0	2.439
	5348.0	2.603
	6293.0	2.772
	7405.0	2.945
	8713.0	3.121
	10250.0	3.299
	12060.0	3.48
	14190.0	3.661
	16700.0	3.841
	19650.0	4.02
	23130.0	4.196
	27210.0	4.368
	32020.0	4.534
	37680.0	4.694
	44330.0	4.845
	52160.0	4.986
	61380.0	5.115
	72230.0	5.231
	84990.0	5.332

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1074
q = 14.2
mu = 2.046
epsilonL = 1.589e-06
Eth = 34.5

Fit range

E = 34.5 – 100000