{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"34.5": {"P": 4.244e-35}, "40.6": {"P": 0.000151}, "47.77": {"P": 0.0008689}, "56.21": {"P": 0.002775}, "66.15": {"P": 0.006939}, "77.83": {"P": 0.01508}, "91.58": {"P": 0.02972}, "107.8": {"P": 0.05407}, "126.8": {"P": 0.09139}, "149.2": {"P": 0.1438}, "175.6": {"P": 0.2111}, "206.6": {"P": 0.2902}, "243.1": {"P": 0.3767}, "286.0": {"P": 0.4664}, "336.6": {"P": 0.5568}, "396.0": {"P": 0.6469}, "466.0": {"P": 0.7371}, "548.3": {"P": 0.8282}, "645.2": {"P": 0.9215}, "759.2": {"P": 1.018}, "893.3": {"P": 1.118}, "1051.0": {"P": 1.224}, "1237.0": {"P": 1.334}, "1455.0": {"P": 1.451}, "1712.0": {"P": 1.573}, "2015.0": {"P": 1.702}, "2371.0": {"P": 1.837}, "2790.0": {"P": 1.979}, "3283.0": {"P": 2.126}, "3863.0": {"P": 2.28}, "4545.0": {"P": 2.439}, "5348.0": {"P": 2.603}, "6293.0": {"P": 2.772}, "7405.0": {"P": 2.945}, "8713.0": {"P": 3.121}, "10250.0": {"P": 3.299}, "12060.0": {"P": 3.48}, "14190.0": {"P": 3.661}, "16700.0": {"P": 3.841}, "19650.0": {"P": 4.02}, "23130.0": {"P": 4.196}, "27210.0": {"P": 4.368}, "32020.0": {"P": 4.534}, "37680.0": {"P": 4.694}, "44330.0": {"P": 4.845}, "52160.0": {"P": 4.986}, "61380.0": {"P": 5.115}, "72230.0": {"P": 5.231}, "84990.0": {"P": 5.332}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1074, "q": 14.2, "mu": 2.046, "epsilonL": 1.589e-06, "Eth": 34.5}, "E_min": 34.5, "E_max": 100000}}]}