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Plasma-Surface Interaction Data Set 439

Sputtering of T+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
147.20.0
168.20.0001438
192.10.0003522
219.50.0006342
250.70.001
286.40.001458
327.20.002009
373.80.00265
427.00.003366
487.70.004138
557.20.004939
636.50.005742
727.10.006521
830.60.007254
948.80.007926
1084.00.008526
1238.00.009052
1414.00.009502
1616.00.009879
1846.00.01019
2108.00.01043
2408.00.01061
2751.00.01073
3143.00.0108
3590.00.01082
4101.00.01079
4685.00.01072
5352.00.01061
6114.00.01045
6984.00.01026
7978.00.01003
9114.00.009766
10410.00.009476
11890.00.009161
13590.00.008824
15520.00.008469
17730.00.008099
20250.00.007719
23130.00.007332
26430.00.006941
30190.00.00655
34490.00.006163
39390.00.005781
45000.00.005407
51410.00.005045
58720.00.004694
67080.00.004357
76630.00.004034
87540.00.003727

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 147.2 – 100000