{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"147.2": {"P": 0}, "168.2": {"P": 0.0001438}, "192.1": {"P": 0.0003522}, "219.5": {"P": 0.0006342}, "250.7": {"P": 0.001}, "286.4": {"P": 0.001458}, "327.2": {"P": 0.002009}, "373.8": {"P": 0.00265}, "427.0": {"P": 0.003366}, "487.7": {"P": 0.004138}, "557.2": {"P": 0.004939}, "636.5": {"P": 0.005742}, "727.1": {"P": 0.006521}, "830.6": {"P": 0.007254}, "948.8": {"P": 0.007926}, "1084.0": {"P": 0.008526}, "1238.0": {"P": 0.009052}, "1414.0": {"P": 0.009502}, "1616.0": {"P": 0.009879}, "1846.0": {"P": 0.01019}, "2108.0": {"P": 0.01043}, "2408.0": {"P": 0.01061}, "2751.0": {"P": 0.01073}, "3143.0": {"P": 0.0108}, "3590.0": {"P": 0.01082}, "4101.0": {"P": 0.01079}, "4685.0": {"P": 0.01072}, "5352.0": {"P": 0.01061}, "6114.0": {"P": 0.01045}, "6984.0": {"P": 0.01026}, "7978.0": {"P": 0.01003}, "9114.0": {"P": 0.009766}, "10410.0": {"P": 0.009476}, "11890.0": {"P": 0.009161}, "13590.0": {"P": 0.008824}, "15520.0": {"P": 0.008469}, "17730.0": {"P": 0.008099}, "20250.0": {"P": 0.007719}, "23130.0": {"P": 0.007332}, "26430.0": {"P": 0.006941}, "30190.0": {"P": 0.00655}, "34490.0": {"P": 0.006163}, "39390.0": {"P": 0.005781}, "45000.0": {"P": 0.005407}, "51410.0": {"P": 0.005045}, "58720.0": {"P": 0.004694}, "67080.0": {"P": 0.004357}, "76630.0": {"P": 0.004034}, "87540.0": {"P": 0.003727}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2642, "q": 0.0284, "mu": 1.042, "epsilonL": 0.000102, "Eth": 147.2}, "E_min": 147.2, "E_max": 100000}}]}