{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Ta(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2642, "q": 0.0284, "mu": 1.042, "epsilonL": 0.000102, "Eth": 147.2}, "E_min": 147.2, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
147.2	0.0	
168.2	0.0001438	
192.1	0.0003522	
219.5	0.0006342	
250.7	0.001	
286.4	0.001458	
327.2	0.002009	
373.8	0.00265	
427.0	0.003366	
487.7	0.004138	
557.2	0.004939	
636.5	0.005742	
727.1	0.006521	
830.6	0.007254	
948.8	0.007926	
1084.0	0.008526	
1238.0	0.009052	
1414.0	0.009502	
1616.0	0.009879	
1846.0	0.01019	
2108.0	0.01043	
2408.0	0.01061	
2751.0	0.01073	
3143.0	0.0108	
3590.0	0.01082	
4101.0	0.01079	
4685.0	0.01072	
5352.0	0.01061	
6114.0	0.01045	
6984.0	0.01026	
7978.0	0.01003	
9114.0	0.009766	
10410.0	0.009476	
11890.0	0.009161	
13590.0	0.008824	
15520.0	0.008469	
17730.0	0.008099	
20250.0	0.007719	
23130.0	0.007332	
26430.0	0.006941	
30190.0	0.00655	
34490.0	0.006163	
39390.0	0.005781	
45000.0	0.005407	
51410.0	0.005045	
58720.0	0.004694	
67080.0	0.004357	
76630.0	0.004034	
87540.0	0.003727	
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