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Plasma-Surface Interaction Data Set 437

Sputtering of H+ on Ta(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ta(pc) at 300 K

angle = 0.0 deg E /eV P
483.10.0
538.78.89e-05
600.60.0001637
669.70.000245
746.70.0003358
832.50.0004376
928.20.0005509
1035.00.0006756
1154.00.000811
1287.00.0009557
1435.00.001108
1599.00.001264
1783.00.001423
1988.00.00158
2217.00.001733
2472.00.001878
2756.00.002013
3073.00.002135
3426.00.002243
3820.00.002335
4259.00.002411
4749.00.00247
5295.00.002514
5904.00.002541
6583.00.002554
7340.00.002553
8183.00.002538
9124.00.002513
10170.00.002476
11340.00.002431
12650.00.002377
14100.00.002316
15720.00.002249
17530.00.002177
19550.00.002101
21790.00.002022
24300.00.00194
27090.00.001858
30210.00.001774
33680.00.00169
37550.00.001607
41870.00.001524
46680.00.001443
52050.00.001363
58030.00.001286
64710.00.001211
72150.00.001138
80440.00.001068
89690.00.001001

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 483.1 – 100000