{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ta", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"483.1": {"P": 0}, "538.7": {"P": 8.89e-05}, "600.6": {"P": 0.0001637}, "669.7": {"P": 0.000245}, "746.7": {"P": 0.0003358}, "832.5": {"P": 0.0004376}, "928.2": {"P": 0.0005509}, "1035.0": {"P": 0.0006756}, "1154.0": {"P": 0.000811}, "1287.0": {"P": 0.0009557}, "1435.0": {"P": 0.001108}, "1599.0": {"P": 0.001264}, "1783.0": {"P": 0.001423}, "1988.0": {"P": 0.00158}, "2217.0": {"P": 0.001733}, "2472.0": {"P": 0.001878}, "2756.0": {"P": 0.002013}, "3073.0": {"P": 0.002135}, "3426.0": {"P": 0.002243}, "3820.0": {"P": 0.002335}, "4259.0": {"P": 0.002411}, "4749.0": {"P": 0.00247}, "5295.0": {"P": 0.002514}, "5904.0": {"P": 0.002541}, "6583.0": {"P": 0.002554}, "7340.0": {"P": 0.002553}, "8183.0": {"P": 0.002538}, "9124.0": {"P": 0.002513}, "10170.0": {"P": 0.002476}, "11340.0": {"P": 0.002431}, "12650.0": {"P": 0.002377}, "14100.0": {"P": 0.002316}, "15720.0": {"P": 0.002249}, "17530.0": {"P": 0.002177}, "19550.0": {"P": 0.002101}, "21790.0": {"P": 0.002022}, "24300.0": {"P": 0.00194}, "27090.0": {"P": 0.001858}, "30210.0": {"P": 0.001774}, "33680.0": {"P": 0.00169}, "37550.0": {"P": 0.001607}, "41870.0": {"P": 0.001524}, "46680.0": {"P": 0.001443}, "52050.0": {"P": 0.001363}, "58030.0": {"P": 0.001286}, "64710.0": {"P": 0.001211}, "72150.0": {"P": 0.001138}, "80440.0": {"P": 0.001068}, "89690.0": {"P": 0.001001}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5966, "q": 0.0078, "mu": 0.7141, "epsilonL": 0.0001031, "Eth": 483.1}, "E_min": 483.1, "E_max": 100000}}]}