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Plasma-Surface Interaction Data Set 434

Sputtering of Ar+ on Hf(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Hf(pc) at 300 K

angle = 0.0 deg E /eV P
23.680.0
28.080.0002503
33.30.001311
39.480.00395
46.820.009421
55.510.01957
65.830.03672
78.050.06321
92.550.1005
109.70.148
130.10.2037
154.30.264
183.00.3262
216.90.3885
257.20.4502
305.00.5118
361.70.5738
428.80.6368
508.50.7016
602.90.7687
714.90.8385
847.70.9113
1005.00.9872
1192.01.066
1413.01.148
1676.01.234
1987.01.322
2356.01.412
2794.01.505
3313.01.6
3928.01.696
4658.01.793
5523.01.89
6549.01.987
7765.02.082
9207.02.176
10920.02.268
12950.02.356
15350.02.44
18200.02.519
21580.02.592
25590.02.658
30340.02.715
35980.02.764
42660.02.802
50590.02.83
59980.02.846
71120.02.848
84340.02.838

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 23.68 – 100000