{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Hf", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"23.68": {"P": 0}, "28.08": {"P": 0.0002503}, "33.3": {"P": 0.001311}, "39.48": {"P": 0.00395}, "46.82": {"P": 0.009421}, "55.51": {"P": 0.01957}, "65.83": {"P": 0.03672}, "78.05": {"P": 0.06321}, "92.55": {"P": 0.1005}, "109.7": {"P": 0.148}, "130.1": {"P": 0.2037}, "154.3": {"P": 0.264}, "183.0": {"P": 0.3262}, "216.9": {"P": 0.3885}, "257.2": {"P": 0.4502}, "305.0": {"P": 0.5118}, "361.7": {"P": 0.5738}, "428.8": {"P": 0.6368}, "508.5": {"P": 0.7016}, "602.9": {"P": 0.7687}, "714.9": {"P": 0.8385}, "847.7": {"P": 0.9113}, "1005.0": {"P": 0.9872}, "1192.0": {"P": 1.066}, "1413.0": {"P": 1.148}, "1676.0": {"P": 1.234}, "1987.0": {"P": 1.322}, "2356.0": {"P": 1.412}, "2794.0": {"P": 1.505}, "3313.0": {"P": 1.6}, "3928.0": {"P": 1.696}, "4658.0": {"P": 1.793}, "5523.0": {"P": 1.89}, "6549.0": {"P": 1.987}, "7765.0": {"P": 2.082}, "9207.0": {"P": 2.176}, "10920.0": {"P": 2.268}, "12950.0": {"P": 2.356}, "15350.0": {"P": 2.44}, "18200.0": {"P": 2.519}, "21580.0": {"P": 2.592}, "25590.0": {"P": 2.658}, "30340.0": {"P": 2.715}, "35980.0": {"P": 2.764}, "42660.0": {"P": 2.802}, "50590.0": {"P": 2.83}, "59980.0": {"P": 2.846}, "71120.0": {"P": 2.848}, "84340.0": {"P": 2.838}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0841, "q": 7.284, "mu": 1.909, "epsilonL": 4.172e-06, "Eth": 23.68}, "E_min": 23.68, "E_max": 100000}}]}