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Plasma-Surface Interaction Data Set 426

Sputtering of ⁴He⁺ on Tm(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Tm(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.44	0.0
	38.22	0.0002315
	45.03	0.001144
	53.05	0.003262
	62.5	0.007295
	73.63	0.01398
	86.75	0.02371
	102.2	0.03621
	120.4	0.05045
	141.9	0.06509
	167.1	0.07907
	196.9	0.09183
	232.0	0.1033
	273.3	0.1136
	322.0	0.123
	379.4	0.1317
	447.0	0.1399
	526.6	0.1476
	620.5	0.155
	731.0	0.1622
	861.2	0.169
	1015.0	0.1754
	1195.0	0.1816
	1408.0	0.1873
	1659.0	0.1926
	1955.0	0.1974
	2303.0	0.2016
	2714.0	0.2052
	3197.0	0.2081
	3767.0	0.2103
	4438.0	0.2117
	5228.0	0.2122
	6160.0	0.2117
	7257.0	0.2104
	8550.0	0.208
	10070.0	0.2047
	11870.0	0.2004
	13980.0	0.1952
	16470.0	0.1892
	19410.0	0.1823
	22870.0	0.1748
	26940.0	0.1667
	31740.0	0.1581
	37390.0	0.1491
	44050.0	0.14
	51900.0	0.1308
	61150.0	0.1216
	72040.0	0.1125
	84880.0	0.1037

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1182
q = 0.5425
mu = 1.862
epsilonL = 5.368e-05
Eth = 32.44

Fit range

E = 32.44 – 100000