{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"32.44": {"P": 0}, "38.22": {"P": 0.0002315}, "45.03": {"P": 0.001144}, "53.05": {"P": 0.003262}, "62.5": {"P": 0.007295}, "73.63": {"P": 0.01398}, "86.75": {"P": 0.02371}, "102.2": {"P": 0.03621}, "120.4": {"P": 0.05045}, "141.9": {"P": 0.06509}, "167.1": {"P": 0.07907}, "196.9": {"P": 0.09183}, "232.0": {"P": 0.1033}, "273.3": {"P": 0.1136}, "322.0": {"P": 0.123}, "379.4": {"P": 0.1317}, "447.0": {"P": 0.1399}, "526.6": {"P": 0.1476}, "620.5": {"P": 0.155}, "731.0": {"P": 0.1622}, "861.2": {"P": 0.169}, "1015.0": {"P": 0.1754}, "1195.0": {"P": 0.1816}, "1408.0": {"P": 0.1873}, "1659.0": {"P": 0.1926}, "1955.0": {"P": 0.1974}, "2303.0": {"P": 0.2016}, "2714.0": {"P": 0.2052}, "3197.0": {"P": 0.2081}, "3767.0": {"P": 0.2103}, "4438.0": {"P": 0.2117}, "5228.0": {"P": 0.2122}, "6160.0": {"P": 0.2117}, "7257.0": {"P": 0.2104}, "8550.0": {"P": 0.208}, "10070.0": {"P": 0.2047}, "11870.0": {"P": 0.2004}, "13980.0": {"P": 0.1952}, "16470.0": {"P": 0.1892}, "19410.0": {"P": 0.1823}, "22870.0": {"P": 0.1748}, "26940.0": {"P": 0.1667}, "31740.0": {"P": 0.1581}, "37390.0": {"P": 0.1491}, "44050.0": {"P": 0.14}, "51900.0": {"P": 0.1308}, "61150.0": {"P": 0.1216}, "72040.0": {"P": 0.1125}, "84880.0": {"P": 0.1037}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1182, "q": 0.5425, "mu": 1.862, "epsilonL": 5.368e-05, "Eth": 32.44}, "E_min": 32.44, "E_max": 100000}}]}