{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Tm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1182, "q": 0.5425, "mu": 1.862, "epsilonL": 5.368e-05, "Eth": 32.44}, "E_min": 32.44, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.44	0.0	
38.22	0.0002315	
45.03	0.001144	
53.05	0.003262	
62.5	0.007295	
73.63	0.01398	
86.75	0.02371	
102.2	0.03621	
120.4	0.05045	
141.9	0.06509	
167.1	0.07907	
196.9	0.09183	
232.0	0.1033	
273.3	0.1136	
322.0	0.123	
379.4	0.1317	
447.0	0.1399	
526.6	0.1476	
620.5	0.155	
731.0	0.1622	
861.2	0.169	
1015.0	0.1754	
1195.0	0.1816	
1408.0	0.1873	
1659.0	0.1926	
1955.0	0.1974	
2303.0	0.2016	
2714.0	0.2052	
3197.0	0.2081	
3767.0	0.2103	
4438.0	0.2117	
5228.0	0.2122	
6160.0	0.2117	
7257.0	0.2104	
8550.0	0.208	
10070.0	0.2047	
11870.0	0.2004	
13980.0	0.1952	
16470.0	0.1892	
19410.0	0.1823	
22870.0	0.1748	
26940.0	0.1667	
31740.0	0.1581	
37390.0	0.1491	
44050.0	0.14	
51900.0	0.1308	
61150.0	0.1216	
72040.0	0.1125	
84880.0	0.1037	
-----