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Plasma-Surface Interaction Data Set 422

Sputtering of H+ on Tm(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Tm(pc) at 300 K

angle = 0.0 deg E /eV P
119.42.899e-29
137.05.437e-05
157.10.0002199
180.30.0005452
206.80.001095
237.30.001938
272.20.003122
312.30.004651
358.30.006462
411.00.008434
471.50.01042
541.00.01229
620.60.01395
712.00.01537
816.80.01656
937.10.01753
1075.00.01831
1233.00.01893
1415.00.01943
1623.00.01981
1862.00.02009
2136.00.02028
2451.00.02039
2812.00.02042
3226.00.02037
3701.00.02025
4246.00.02005
4871.00.01979
5588.00.01945
6411.00.01906
7355.00.0186
8438.00.01808
9680.00.01751
11110.00.01689
12740.00.01624
14620.00.01555
16770.00.01483
19240.00.0141
22070.00.01336
25320.00.01261
29050.00.01186
33330.00.01113
38230.00.0104
43860.00.009697
50320.00.009015
57730.00.008358
66230.00.007729
75980.00.00713
87170.00.006562

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 119.4 – 100000