{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tm", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"119.4": {"P": 2.899e-29}, "137.0": {"P": 5.437e-05}, "157.1": {"P": 0.0002199}, "180.3": {"P": 0.0005452}, "206.8": {"P": 0.001095}, "237.3": {"P": 0.001938}, "272.2": {"P": 0.003122}, "312.3": {"P": 0.004651}, "358.3": {"P": 0.006462}, "411.0": {"P": 0.008434}, "471.5": {"P": 0.01042}, "541.0": {"P": 0.01229}, "620.6": {"P": 0.01395}, "712.0": {"P": 0.01537}, "816.8": {"P": 0.01656}, "937.1": {"P": 0.01753}, "1075.0": {"P": 0.01831}, "1233.0": {"P": 0.01893}, "1415.0": {"P": 0.01943}, "1623.0": {"P": 0.01981}, "1862.0": {"P": 0.02009}, "2136.0": {"P": 0.02028}, "2451.0": {"P": 0.02039}, "2812.0": {"P": 0.02042}, "3226.0": {"P": 0.02037}, "3701.0": {"P": 0.02025}, "4246.0": {"P": 0.02005}, "4871.0": {"P": 0.01979}, "5588.0": {"P": 0.01945}, "6411.0": {"P": 0.01906}, "7355.0": {"P": 0.0186}, "8438.0": {"P": 0.01808}, "9680.0": {"P": 0.01751}, "11110.0": {"P": 0.01689}, "12740.0": {"P": 0.01624}, "14620.0": {"P": 0.01555}, "16770.0": {"P": 0.01483}, "19240.0": {"P": 0.0141}, "22070.0": {"P": 0.01336}, "25320.0": {"P": 0.01261}, "29050.0": {"P": 0.01186}, "33330.0": {"P": 0.01113}, "38230.0": {"P": 0.0104}, "43860.0": {"P": 0.009697}, "50320.0": {"P": 0.009015}, "57730.0": {"P": 0.008358}, "66230.0": {"P": 0.007729}, "75980.0": {"P": 0.00713}, "87170.0": {"P": 0.006562}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3646, "q": 0.0525, "mu": 1.668, "epsilonL": 0.000111, "Eth": 119.4}, "E_min": 119.4, "E_max": 100000}}]}