pwiDB

Plasma-Surface Interaction Data Set 421

Sputtering of Ar⁺ on Tb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Tb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	14.15	0.0
	16.96	0.0002299
	20.32	0.001376
	24.35	0.004547
	29.18	0.01168
	34.96	0.02577
	41.89	0.05064
	50.2	0.08983
	60.15	0.1446
	72.08	0.2126
	86.37	0.2889
	103.5	0.3684
	124.0	0.448
	148.6	0.527
	178.1	0.606
	213.4	0.686
	255.7	0.7684
	306.4	0.8543
	367.1	0.9445
	439.9	1.04
	527.1	1.14
	631.6	1.247
	756.9	1.359
	906.9	1.478
	1087.0	1.602
	1302.0	1.731
	1560.0	1.867
	1870.0	2.006
	2241.0	2.151
	2685.0	2.299
	3217.0	2.449
	3855.0	2.602
	4619.0	2.756
	5535.0	2.91
	6633.0	3.062
	7948.0	3.212
	9523.0	3.358
	11410.0	3.498
	13670.0	3.632
	16390.0	3.757
	19630.0	3.872
	23530.0	3.975
	28190.0	4.065
	33780.0	4.139
	40480.0	4.195
	48500.0	4.232
	58120.0	4.249
	69650.0	4.244
	83450.0	4.216

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0825
q = 10.87
mu = 2.05
epsilonL = 4.63e-06
Eth = 14.15

Fit range

E = 14.15 – 100000