{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"14.15": {"P": 0}, "16.96": {"P": 0.0002299}, "20.32": {"P": 0.001376}, "24.35": {"P": 0.004547}, "29.18": {"P": 0.01168}, "34.96": {"P": 0.02577}, "41.89": {"P": 0.05064}, "50.2": {"P": 0.08983}, "60.15": {"P": 0.1446}, "72.08": {"P": 0.2126}, "86.37": {"P": 0.2889}, "103.5": {"P": 0.3684}, "124.0": {"P": 0.448}, "148.6": {"P": 0.527}, "178.1": {"P": 0.606}, "213.4": {"P": 0.686}, "255.7": {"P": 0.7684}, "306.4": {"P": 0.8543}, "367.1": {"P": 0.9445}, "439.9": {"P": 1.04}, "527.1": {"P": 1.14}, "631.6": {"P": 1.247}, "756.9": {"P": 1.359}, "906.9": {"P": 1.478}, "1087.0": {"P": 1.602}, "1302.0": {"P": 1.731}, "1560.0": {"P": 1.867}, "1870.0": {"P": 2.006}, "2241.0": {"P": 2.151}, "2685.0": {"P": 2.299}, "3217.0": {"P": 2.449}, "3855.0": {"P": 2.602}, "4619.0": {"P": 2.756}, "5535.0": {"P": 2.91}, "6633.0": {"P": 3.062}, "7948.0": {"P": 3.212}, "9523.0": {"P": 3.358}, "11410.0": {"P": 3.498}, "13670.0": {"P": 3.632}, "16390.0": {"P": 3.757}, "19630.0": {"P": 3.872}, "23530.0": {"P": 3.975}, "28190.0": {"P": 4.065}, "33780.0": {"P": 4.139}, "40480.0": {"P": 4.195}, "48500.0": {"P": 4.232}, "58120.0": {"P": 4.249}, "69650.0": {"P": 4.244}, "83450.0": {"P": 4.216}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0825, "q": 10.87, "mu": 2.05, "epsilonL": 4.63e-06, "Eth": 14.15}, "E_min": 14.15, "E_max": 100000}}]}