{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0825, "q": 10.87, "mu": 2.05, "epsilonL": 4.63e-06, "Eth": 14.15}, "E_min": 14.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.15	0.0	
16.96	0.0002299	
20.32	0.001376	
24.35	0.004547	
29.18	0.01168	
34.96	0.02577	
41.89	0.05064	
50.2	0.08983	
60.15	0.1446	
72.08	0.2126	
86.37	0.2889	
103.5	0.3684	
124.0	0.448	
148.6	0.527	
178.1	0.606	
213.4	0.686	
255.7	0.7684	
306.4	0.8543	
367.1	0.9445	
439.9	1.04	
527.1	1.14	
631.6	1.247	
756.9	1.359	
906.9	1.478	
1087.0	1.602	
1302.0	1.731	
1560.0	1.867	
1870.0	2.006	
2241.0	2.151	
2685.0	2.299	
3217.0	2.449	
3855.0	2.602	
4619.0	2.756	
5535.0	2.91	
6633.0	3.062	
7948.0	3.212	
9523.0	3.358	
11410.0	3.498	
13670.0	3.632	
16390.0	3.757	
19630.0	3.872	
23530.0	3.975	
28190.0	4.065	
33780.0	4.139	
40480.0	4.195	
48500.0	4.232	
58120.0	4.249	
69650.0	4.244	
83450.0	4.216	
-----