pwiDB

Plasma-Surface Interaction Data Set 415

Sputtering of Kr⁺ on Sm(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Sm(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.261	0.0
	11.19	5.449e-05
	13.53	0.0004561
	16.35	0.001893
	19.77	0.005869
	23.89	0.01534
	28.88	0.03526
	34.9	0.0721
	42.19	0.1308
	50.99	0.2106
	61.63	0.304
	74.49	0.4022
	90.04	0.5004
	108.8	0.598
	131.5	0.6967
	159.0	0.7993
	192.2	0.908
	232.3	1.025
	280.7	1.152
	339.3	1.29
	410.1	1.44
	495.7	1.603
	599.2	1.781
	724.2	1.974
	875.3	2.182
	1058.0	2.406
	1279.0	2.647
	1546.0	2.904
	1868.0	3.178
	2258.0	3.468
	2729.0	3.773
	3299.0	4.094
	3987.0	4.429
	4819.0	4.776
	5825.0	5.135
	7041.0	5.503
	8510.0	5.879
	10290.0	6.259
	12430.0	6.641
	15030.0	7.022
	18160.0	7.398
	21950.0	7.767
	26530.0	8.124
	32070.0	8.465
	38760.0	8.785
	46850.0	9.081
	56630.0	9.348
	68450.0	9.58
	82730.0	9.773

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1279
q = 25.76
mu = 2.445
epsilonL = 1.816e-06
Eth = 9.261

Fit range

E = 9.261 – 100000