{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sm", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Sm(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1279, "q": 25.76, "mu": 2.445, "epsilonL": 1.816e-06, "Eth": 9.261}, "E_min": 9.261, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.261	0.0	
11.19	5.449e-05	
13.53	0.0004561	
16.35	0.001893	
19.77	0.005869	
23.89	0.01534	
28.88	0.03526	
34.9	0.0721	
42.19	0.1308	
50.99	0.2106	
61.63	0.304	
74.49	0.4022	
90.04	0.5004	
108.8	0.598	
131.5	0.6967	
159.0	0.7993	
192.2	0.908	
232.3	1.025	
280.7	1.152	
339.3	1.29	
410.1	1.44	
495.7	1.603	
599.2	1.781	
724.2	1.974	
875.3	2.182	
1058.0	2.406	
1279.0	2.647	
1546.0	2.904	
1868.0	3.178	
2258.0	3.468	
2729.0	3.773	
3299.0	4.094	
3987.0	4.429	
4819.0	4.776	
5825.0	5.135	
7041.0	5.503	
8510.0	5.879	
10290.0	6.259	
12430.0	6.641	
15030.0	7.022	
18160.0	7.398	
21950.0	7.767	
26530.0	8.124	
32070.0	8.465	
38760.0	8.785	
46850.0	9.081	
56630.0	9.348	
68450.0	9.58	
82730.0	9.773	
-----