{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sm", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"9.261": {"P": 0}, "11.19": {"P": 5.449e-05}, "13.53": {"P": 0.0004561}, "16.35": {"P": 0.001893}, "19.77": {"P": 0.005869}, "23.89": {"P": 0.01534}, "28.88": {"P": 0.03526}, "34.9": {"P": 0.0721}, "42.19": {"P": 0.1308}, "50.99": {"P": 0.2106}, "61.63": {"P": 0.304}, "74.49": {"P": 0.4022}, "90.04": {"P": 0.5004}, "108.8": {"P": 0.598}, "131.5": {"P": 0.6967}, "159.0": {"P": 0.7993}, "192.2": {"P": 0.908}, "232.3": {"P": 1.025}, "280.7": {"P": 1.152}, "339.3": {"P": 1.29}, "410.1": {"P": 1.44}, "495.7": {"P": 1.603}, "599.2": {"P": 1.781}, "724.2": {"P": 1.974}, "875.3": {"P": 2.182}, "1058.0": {"P": 2.406}, "1279.0": {"P": 2.647}, "1546.0": {"P": 2.904}, "1868.0": {"P": 3.178}, "2258.0": {"P": 3.468}, "2729.0": {"P": 3.773}, "3299.0": {"P": 4.094}, "3987.0": {"P": 4.429}, "4819.0": {"P": 4.776}, "5825.0": {"P": 5.135}, "7041.0": {"P": 5.503}, "8510.0": {"P": 5.879}, "10290.0": {"P": 6.259}, "12430.0": {"P": 6.641}, "15030.0": {"P": 7.022}, "18160.0": {"P": 7.398}, "21950.0": {"P": 7.767}, "26530.0": {"P": 8.124}, "32070.0": {"P": 8.465}, "38760.0": {"P": 8.785}, "46850.0": {"P": 9.081}, "56630.0": {"P": 9.348}, "68450.0": {"P": 9.58}, "82730.0": {"P": 9.773}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1279, "q": 25.76, "mu": 2.445, "epsilonL": 1.816e-06, "Eth": 9.261}, "E_min": 9.261, "E_max": 100000}}]}