pwiDB

Plasma-Surface Interaction Data Set 409

Sputtering of Kr⁺ on Sn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Sn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.64	2.633e-45
	16.35	1.581e-05
	19.61	0.0001535
	23.52	0.0006982
	28.2	0.002328
	33.82	0.006521
	40.55	0.0162
	48.63	0.03639
	58.32	0.07388
	69.93	0.1342
	83.86	0.2168
	100.6	0.3133
	120.6	0.4132
	144.6	0.5105
	173.4	0.6044
	208.0	0.6969
	249.4	0.7907
	299.0	0.8884
	358.6	0.9917
	430.0	1.102
	515.7	1.22
	618.4	1.347
	741.6	1.484
	889.3	1.63
	1066.0	1.787
	1279.0	1.953
	1533.0	2.13
	1839.0	2.318
	2205.0	2.515
	2644.0	2.721
	3171.0	2.937
	3803.0	3.161
	4560.0	3.392
	5468.0	3.63
	6558.0	3.873
	7864.0	4.119
	9430.0	4.368
	11310.0	4.617
	13560.0	4.865
	16260.0	5.109
	19500.0	5.348
	23380.0	5.579
	28040.0	5.799
	33630.0	6.006
	40330.0	6.197
	48360.0	6.37
	57990.0	6.521
	69540.0	6.648
	83390.0	6.747

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3289
q = 17.53
mu = 2.655
epsilonL = 2.142e-06
Eth = 13.64

Fit range

E = 13.64 – 100000