{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3289, "q": 17.53, "mu": 2.655, "epsilonL": 2.142e-06, "Eth": 13.64}, "E_min": 13.64, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.64	2.633e-45	
16.35	1.581e-05	
19.61	0.0001535	
23.52	0.0006982	
28.2	0.002328	
33.82	0.006521	
40.55	0.0162	
48.63	0.03639	
58.32	0.07388	
69.93	0.1342	
83.86	0.2168	
100.6	0.3133	
120.6	0.4132	
144.6	0.5105	
173.4	0.6044	
208.0	0.6969	
249.4	0.7907	
299.0	0.8884	
358.6	0.9917	
430.0	1.102	
515.7	1.22	
618.4	1.347	
741.6	1.484	
889.3	1.63	
1066.0	1.787	
1279.0	1.953	
1533.0	2.13	
1839.0	2.318	
2205.0	2.515	
2644.0	2.721	
3171.0	2.937	
3803.0	3.161	
4560.0	3.392	
5468.0	3.63	
6558.0	3.873	
7864.0	4.119	
9430.0	4.368	
11310.0	4.617	
13560.0	4.865	
16260.0	5.109	
19500.0	5.348	
23380.0	5.579	
28040.0	5.799	
33630.0	6.006	
40330.0	6.197	
48360.0	6.37	
57990.0	6.521	
69540.0	6.648	
83390.0	6.747	
-----