{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"13.64": {"P": 2.633e-45}, "16.35": {"P": 1.581e-05}, "19.61": {"P": 0.0001535}, "23.52": {"P": 0.0006982}, "28.2": {"P": 0.002328}, "33.82": {"P": 0.006521}, "40.55": {"P": 0.0162}, "48.63": {"P": 0.03639}, "58.32": {"P": 0.07388}, "69.93": {"P": 0.1342}, "83.86": {"P": 0.2168}, "100.6": {"P": 0.3133}, "120.6": {"P": 0.4132}, "144.6": {"P": 0.5105}, "173.4": {"P": 0.6044}, "208.0": {"P": 0.6969}, "249.4": {"P": 0.7907}, "299.0": {"P": 0.8884}, "358.6": {"P": 0.9917}, "430.0": {"P": 1.102}, "515.7": {"P": 1.22}, "618.4": {"P": 1.347}, "741.6": {"P": 1.484}, "889.3": {"P": 1.63}, "1066.0": {"P": 1.787}, "1279.0": {"P": 1.953}, "1533.0": {"P": 2.13}, "1839.0": {"P": 2.318}, "2205.0": {"P": 2.515}, "2644.0": {"P": 2.721}, "3171.0": {"P": 2.937}, "3803.0": {"P": 3.161}, "4560.0": {"P": 3.392}, "5468.0": {"P": 3.63}, "6558.0": {"P": 3.873}, "7864.0": {"P": 4.119}, "9430.0": {"P": 4.368}, "11310.0": {"P": 4.617}, "13560.0": {"P": 4.865}, "16260.0": {"P": 5.109}, "19500.0": {"P": 5.348}, "23380.0": {"P": 5.579}, "28040.0": {"P": 5.799}, "33630.0": {"P": 6.006}, "40330.0": {"P": 6.197}, "48360.0": {"P": 6.37}, "57990.0": {"P": 6.521}, "69540.0": {"P": 6.648}, "83390.0": {"P": 6.747}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3289, "q": 17.53, "mu": 2.655, "epsilonL": 2.142e-06, "Eth": 13.64}, "E_min": 13.64, "E_max": 100000}}]}