pwiDB

Plasma-Surface Interaction Data Set 407

Sputtering of Ne⁺ on Sn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Sn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	11.55	1.146e-38
	13.9	0.0001188
	16.73	0.0008525
	20.13	0.003173
	24.22	0.008918
	29.14	0.02105
	35.06	0.04322
	42.19	0.0779
	50.76	0.124
	61.08	0.1765
	73.5	0.2302
	88.43	0.2817
	106.4	0.3305
	128.0	0.3775
	154.1	0.4238
	185.4	0.4706
	223.0	0.5186
	268.4	0.5684
	322.9	0.6202
	388.5	0.6742
	467.5	0.7305
	562.5	0.789
	676.9	0.8495
	814.4	0.9118
	979.9	0.9757
	1179.0	1.041
	1419.0	1.107
	1707.0	1.173
	2054.0	1.239
	2471.0	1.304
	2974.0	1.368
	3578.0	1.43
	4305.0	1.49
	5180.0	1.546
	6233.0	1.599
	7500.0	1.646
	9024.0	1.688
	10860.0	1.724
	13070.0	1.752
	15720.0	1.772
	18920.0	1.784
	22760.0	1.786
	27390.0	1.779
	32950.0	1.761
	39650.0	1.733
	47710.0	1.694
	57400.0	1.645
	69070.0	1.587
	83110.0	1.521

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1152
q = 4.569
mu = 2.268
epsilonL = 1.303e-05
Eth = 11.55

Fit range

E = 11.55 – 100000