{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1152, "q": 4.569, "mu": 2.268, "epsilonL": 1.303e-05, "Eth": 11.55}, "E_min": 11.55, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
11.55	1.146e-38	
13.9	0.0001188	
16.73	0.0008525	
20.13	0.003173	
24.22	0.008918	
29.14	0.02105	
35.06	0.04322	
42.19	0.0779	
50.76	0.124	
61.08	0.1765	
73.5	0.2302	
88.43	0.2817	
106.4	0.3305	
128.0	0.3775	
154.1	0.4238	
185.4	0.4706	
223.0	0.5186	
268.4	0.5684	
322.9	0.6202	
388.5	0.6742	
467.5	0.7305	
562.5	0.789	
676.9	0.8495	
814.4	0.9118	
979.9	0.9757	
1179.0	1.041	
1419.0	1.107	
1707.0	1.173	
2054.0	1.239	
2471.0	1.304	
2974.0	1.368	
3578.0	1.43	
4305.0	1.49	
5180.0	1.546	
6233.0	1.599	
7500.0	1.646	
9024.0	1.688	
10860.0	1.724	
13070.0	1.752	
15720.0	1.772	
18920.0	1.784	
22760.0	1.786	
27390.0	1.779	
32950.0	1.761	
39650.0	1.733	
47710.0	1.694	
57400.0	1.645	
69070.0	1.587	
83110.0	1.521	
-----