{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"11.55": {"P": 1.146e-38}, "13.9": {"P": 0.0001188}, "16.73": {"P": 0.0008525}, "20.13": {"P": 0.003173}, "24.22": {"P": 0.008918}, "29.14": {"P": 0.02105}, "35.06": {"P": 0.04322}, "42.19": {"P": 0.0779}, "50.76": {"P": 0.124}, "61.08": {"P": 0.1765}, "73.5": {"P": 0.2302}, "88.43": {"P": 0.2817}, "106.4": {"P": 0.3305}, "128.0": {"P": 0.3775}, "154.1": {"P": 0.4238}, "185.4": {"P": 0.4706}, "223.0": {"P": 0.5186}, "268.4": {"P": 0.5684}, "322.9": {"P": 0.6202}, "388.5": {"P": 0.6742}, "467.5": {"P": 0.7305}, "562.5": {"P": 0.789}, "676.9": {"P": 0.8495}, "814.4": {"P": 0.9118}, "979.9": {"P": 0.9757}, "1179.0": {"P": 1.041}, "1419.0": {"P": 1.107}, "1707.0": {"P": 1.173}, "2054.0": {"P": 1.239}, "2471.0": {"P": 1.304}, "2974.0": {"P": 1.368}, "3578.0": {"P": 1.43}, "4305.0": {"P": 1.49}, "5180.0": {"P": 1.546}, "6233.0": {"P": 1.599}, "7500.0": {"P": 1.646}, "9024.0": {"P": 1.688}, "10860.0": {"P": 1.724}, "13070.0": {"P": 1.752}, "15720.0": {"P": 1.772}, "18920.0": {"P": 1.784}, "22760.0": {"P": 1.786}, "27390.0": {"P": 1.779}, "32950.0": {"P": 1.761}, "39650.0": {"P": 1.733}, "47710.0": {"P": 1.694}, "57400.0": {"P": 1.645}, "69070.0": {"P": 1.587}, "83110.0": {"P": 1.521}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1152, "q": 4.569, "mu": 2.268, "epsilonL": 1.303e-05, "Eth": 11.55}, "E_min": 11.55, "E_max": 100000}}]}