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Plasma-Surface Interaction Data Set 401

Sputtering of In+ on In(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of In+ on In(pc) at 300 K

angle = 0.0 deg E /eV P
13.10.0
15.720.0001385
18.870.0007694
22.640.002444
27.180.006162
32.620.01363
39.140.02752
46.980.05164
56.380.09054
67.670.1484
81.210.2272
97.470.3254
117.00.4388
140.40.562
168.50.6911
202.20.8243
242.70.9618
291.31.105
349.61.255
419.61.414
503.51.585
604.31.767
725.31.964
870.52.175
1045.02.403
1254.02.647
1505.02.909
1806.03.189
2167.03.486
2601.03.802
3122.04.136
3747.04.487
4497.04.854
5397.05.238
6477.05.636
7774.06.046
9330.06.467
11200.06.897
13440.07.333
16130.07.772
19360.08.211
23230.08.646
27880.09.075
33460.09.492
40160.09.894
48200.010.28
57850.010.63
69430.010.96
83320.011.26

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 13.1 – 100000