{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "In+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of In+ on In(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1224, "q": 30.77, "mu": 1.947, "epsilonL": 1.309e-06, "Eth": 13.1}, "E_min": 13.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.1	0.0	
15.72	0.0001385	
18.87	0.0007694	
22.64	0.002444	
27.18	0.006162	
32.62	0.01363	
39.14	0.02752	
46.98	0.05164	
56.38	0.09054	
67.67	0.1484	
81.21	0.2272	
97.47	0.3254	
117.0	0.4388	
140.4	0.562	
168.5	0.6911	
202.2	0.8243	
242.7	0.9618	
291.3	1.105	
349.6	1.255	
419.6	1.414	
503.5	1.585	
604.3	1.767	
725.3	1.964	
870.5	2.175	
1045.0	2.403	
1254.0	2.647	
1505.0	2.909	
1806.0	3.189	
2167.0	3.486	
2601.0	3.802	
3122.0	4.136	
3747.0	4.487	
4497.0	4.854	
5397.0	5.238	
6477.0	5.636	
7774.0	6.046	
9330.0	6.467	
11200.0	6.897	
13440.0	7.333	
16130.0	7.772	
19360.0	8.211	
23230.0	8.646	
27880.0	9.075	
33460.0	9.492	
40160.0	9.894	
48200.0	10.28	
57850.0	10.63	
69430.0	10.96	
83320.0	11.26	
-----