{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "In+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"13.1": {"P": 0}, "15.72": {"P": 0.0001385}, "18.87": {"P": 0.0007694}, "22.64": {"P": 0.002444}, "27.18": {"P": 0.006162}, "32.62": {"P": 0.01363}, "39.14": {"P": 0.02752}, "46.98": {"P": 0.05164}, "56.38": {"P": 0.09054}, "67.67": {"P": 0.1484}, "81.21": {"P": 0.2272}, "97.47": {"P": 0.3254}, "117.0": {"P": 0.4388}, "140.4": {"P": 0.562}, "168.5": {"P": 0.6911}, "202.2": {"P": 0.8243}, "242.7": {"P": 0.9618}, "291.3": {"P": 1.105}, "349.6": {"P": 1.255}, "419.6": {"P": 1.414}, "503.5": {"P": 1.585}, "604.3": {"P": 1.767}, "725.3": {"P": 1.964}, "870.5": {"P": 2.175}, "1045.0": {"P": 2.403}, "1254.0": {"P": 2.647}, "1505.0": {"P": 2.909}, "1806.0": {"P": 3.189}, "2167.0": {"P": 3.486}, "2601.0": {"P": 3.802}, "3122.0": {"P": 4.136}, "3747.0": {"P": 4.487}, "4497.0": {"P": 4.854}, "5397.0": {"P": 5.238}, "6477.0": {"P": 5.636}, "7774.0": {"P": 6.046}, "9330.0": {"P": 6.467}, "11200.0": {"P": 6.897}, "13440.0": {"P": 7.333}, "16130.0": {"P": 7.772}, "19360.0": {"P": 8.211}, "23230.0": {"P": 8.646}, "27880.0": {"P": 9.075}, "33460.0": {"P": 9.492}, "40160.0": {"P": 9.894}, "48200.0": {"P": 10.28}, "57850.0": {"P": 10.63}, "69430.0": {"P": 10.96}, "83320.0": {"P": 11.26}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1224, "q": 30.77, "mu": 1.947, "epsilonL": 1.309e-06, "Eth": 13.1}, "E_min": 13.1, "E_max": 100000}}]}