pwiDB

Return to search

Plasma-Surface Interaction Data Set 399

Sputtering of Ne⁺ on In(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on In(pc) at 300 K

angle = 0.0 deg	E /eV	P
	12.18	0.0
	14.64	0.002223
	17.6	0.007671
	21.15	0.01754
	25.42	0.03341
	30.56	0.05679
	36.73	0.08864
	44.14	0.129
	53.06	0.1769
	63.77	0.2308
	76.65	0.2887
	92.13	0.3492
	110.7	0.4113
	133.1	0.4746
	160.0	0.5391
	192.3	0.605
	231.1	0.6724
	277.8	0.7417
	333.9	0.8132
	401.3	0.8869
	482.4	0.9629
	579.8	1.041
	696.8	1.122
	837.6	1.204
	1007.0	1.288
	1210.0	1.373
	1454.0	1.459
	1748.0	1.545
	2101.0	1.63
	2525.0	1.715
	3035.0	1.797
	3648.0	1.877
	4385.0	1.953
	5271.0	2.025
	6335.0	2.092
	7614.0	2.152
	9152.0	2.205
	11000.0	2.249
	13220.0	2.284
	15890.0	2.309
	19100.0	2.322
	22960.0	2.323
	27590.0	2.311
	33170.0	2.286
	39860.0	2.247
	47910.0	2.195
	57590.0	2.131
	69220.0	2.055
	83200.0	1.968

Fit Function: SPTEEX

Y (E) = \frac{q}{2} \frac{{(\frac{E}{E_{th}} - 1)}^{μ} \ln (1 + 1.2288 ϵ)}{λ + {(\frac{E}{E_{th}} - 1)}^{μ} [ϵ + 0.1728 \sqrt{ϵ} + 0.008 ϵ^{0.1504}]}

Coefficients

lambda = 0.0348
q = 5.942
mu = 1.377
epsilonL = 1.33e-05
Eth = 12.18

Fit range

E = 12.18 – 100000