{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on In(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0348, "q": 5.942, "mu": 1.377, "epsilonL": 1.33e-05, "Eth": 12.18}, "E_min": 12.18, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
12.18	0.0	
14.64	0.002223	
17.6	0.007671	
21.15	0.01754	
25.42	0.03341	
30.56	0.05679	
36.73	0.08864	
44.14	0.129	
53.06	0.1769	
63.77	0.2308	
76.65	0.2887	
92.13	0.3492	
110.7	0.4113	
133.1	0.4746	
160.0	0.5391	
192.3	0.605	
231.1	0.6724	
277.8	0.7417	
333.9	0.8132	
401.3	0.8869	
482.4	0.9629	
579.8	1.041	
696.8	1.122	
837.6	1.204	
1007.0	1.288	
1210.0	1.373	
1454.0	1.459	
1748.0	1.545	
2101.0	1.63	
2525.0	1.715	
3035.0	1.797	
3648.0	1.877	
4385.0	1.953	
5271.0	2.025	
6335.0	2.092	
7614.0	2.152	
9152.0	2.205	
11000.0	2.249	
13220.0	2.284	
15890.0	2.309	
19100.0	2.322	
22960.0	2.323	
27590.0	2.311	
33170.0	2.286	
39860.0	2.247	
47910.0	2.195	
57590.0	2.131	
69220.0	2.055	
83200.0	1.968	
-----