{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"12.18": {"P": 0}, "14.64": {"P": 0.002223}, "17.6": {"P": 0.007671}, "21.15": {"P": 0.01754}, "25.42": {"P": 0.03341}, "30.56": {"P": 0.05679}, "36.73": {"P": 0.08864}, "44.14": {"P": 0.129}, "53.06": {"P": 0.1769}, "63.77": {"P": 0.2308}, "76.65": {"P": 0.2887}, "92.13": {"P": 0.3492}, "110.7": {"P": 0.4113}, "133.1": {"P": 0.4746}, "160.0": {"P": 0.5391}, "192.3": {"P": 0.605}, "231.1": {"P": 0.6724}, "277.8": {"P": 0.7417}, "333.9": {"P": 0.8132}, "401.3": {"P": 0.8869}, "482.4": {"P": 0.9629}, "579.8": {"P": 1.041}, "696.8": {"P": 1.122}, "837.6": {"P": 1.204}, "1007.0": {"P": 1.288}, "1210.0": {"P": 1.373}, "1454.0": {"P": 1.459}, "1748.0": {"P": 1.545}, "2101.0": {"P": 1.63}, "2525.0": {"P": 1.715}, "3035.0": {"P": 1.797}, "3648.0": {"P": 1.877}, "4385.0": {"P": 1.953}, "5271.0": {"P": 2.025}, "6335.0": {"P": 2.092}, "7614.0": {"P": 2.152}, "9152.0": {"P": 2.205}, "11000.0": {"P": 2.249}, "13220.0": {"P": 2.284}, "15890.0": {"P": 2.309}, "19100.0": {"P": 2.322}, "22960.0": {"P": 2.323}, "27590.0": {"P": 2.311}, "33170.0": {"P": 2.286}, "39860.0": {"P": 2.247}, "47910.0": {"P": 2.195}, "57590.0": {"P": 2.131}, "69220.0": {"P": 2.055}, "83200.0": {"P": 1.968}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0348, "q": 5.942, "mu": 1.377, "epsilonL": 1.33e-05, "Eth": 12.18}, "E_min": 12.18, "E_max": 100000}}]}