pwiDB

Plasma-Surface Interaction Data Set 392

Sputtering of Xe⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	17.59	3.341e-39
	20.98	5.335e-05
	25.03	0.0003822
	29.86	0.001424
	35.63	0.004059
	42.5	0.009965
	50.7	0.02212
	60.49	0.04532
	72.16	0.08626
	86.08	0.1522
	102.7	0.248
	122.5	0.3722
	146.1	0.5173
	174.3	0.6732
	208.0	0.8327
	248.1	0.9927
	296.0	1.154
	353.1	1.318
	421.3	1.49
	502.5	1.67
	599.5	1.862
	715.2	2.067
	853.2	2.287
	1018.0	2.524
	1214.0	2.778
	1449.0	3.05
	1728.0	3.342
	2062.0	3.653
	2459.0	3.984
	2934.0	4.335
	3500.0	4.705
	4175.0	5.095
	4981.0	5.503
	5942.0	5.929
	7089.0	6.371
	8457.0	6.827
	10090.0	7.297
	12040.0	7.777
	14360.0	8.265
	17130.0	8.758
	20430.0	9.254
	24380.0	9.748
	29080.0	10.24
	34690.0	10.72
	41390.0	11.18
	49370.0	11.63
	58900.0	12.06
	70270.0	12.46
	83820.0	12.82

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2236
q = 35.87
mu = 2.284
epsilonL = 1.106e-06
Eth = 17.59

Fit range

E = 17.59 – 100000