{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2236, "q": 35.87, "mu": 2.284, "epsilonL": 1.106e-06, "Eth": 17.59}, "E_min": 17.59, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
17.59	3.341e-39	
20.98	5.335e-05	
25.03	0.0003822	
29.86	0.001424	
35.63	0.004059	
42.5	0.009965	
50.7	0.02212	
60.49	0.04532	
72.16	0.08626	
86.08	0.1522	
102.7	0.248	
122.5	0.3722	
146.1	0.5173	
174.3	0.6732	
208.0	0.8327	
248.1	0.9927	
296.0	1.154	
353.1	1.318	
421.3	1.49	
502.5	1.67	
599.5	1.862	
715.2	2.067	
853.2	2.287	
1018.0	2.524	
1214.0	2.778	
1449.0	3.05	
1728.0	3.342	
2062.0	3.653	
2459.0	3.984	
2934.0	4.335	
3500.0	4.705	
4175.0	5.095	
4981.0	5.503	
5942.0	5.929	
7089.0	6.371	
8457.0	6.827	
10090.0	7.297	
12040.0	7.777	
14360.0	8.265	
17130.0	8.758	
20430.0	9.254	
24380.0	9.748	
29080.0	10.24	
34690.0	10.72	
41390.0	11.18	
49370.0	11.63	
58900.0	12.06	
70270.0	12.46	
83820.0	12.82	
-----