{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"17.59": {"P": 3.341e-39}, "20.98": {"P": 5.335e-05}, "25.03": {"P": 0.0003822}, "29.86": {"P": 0.001424}, "35.63": {"P": 0.004059}, "42.5": {"P": 0.009965}, "50.7": {"P": 0.02212}, "60.49": {"P": 0.04532}, "72.16": {"P": 0.08626}, "86.08": {"P": 0.1522}, "102.7": {"P": 0.248}, "122.5": {"P": 0.3722}, "146.1": {"P": 0.5173}, "174.3": {"P": 0.6732}, "208.0": {"P": 0.8327}, "248.1": {"P": 0.9927}, "296.0": {"P": 1.154}, "353.1": {"P": 1.318}, "421.3": {"P": 1.49}, "502.5": {"P": 1.67}, "599.5": {"P": 1.862}, "715.2": {"P": 2.067}, "853.2": {"P": 2.287}, "1018.0": {"P": 2.524}, "1214.0": {"P": 2.778}, "1449.0": {"P": 3.05}, "1728.0": {"P": 3.342}, "2062.0": {"P": 3.653}, "2459.0": {"P": 3.984}, "2934.0": {"P": 4.335}, "3500.0": {"P": 4.705}, "4175.0": {"P": 5.095}, "4981.0": {"P": 5.503}, "5942.0": {"P": 5.929}, "7089.0": {"P": 6.371}, "8457.0": {"P": 6.827}, "10090.0": {"P": 7.297}, "12040.0": {"P": 7.777}, "14360.0": {"P": 8.265}, "17130.0": {"P": 8.758}, "20430.0": {"P": 9.254}, "24380.0": {"P": 9.748}, "29080.0": {"P": 10.24}, "34690.0": {"P": 10.72}, "41390.0": {"P": 11.18}, "49370.0": {"P": 11.63}, "58900.0": {"P": 12.06}, "70270.0": {"P": 12.46}, "83820.0": {"P": 12.82}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2236, "q": 35.87, "mu": 2.284, "epsilonL": 1.106e-06, "Eth": 17.59}, "E_min": 17.59, "E_max": 100000}}]}