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Plasma-Surface Interaction Data Set 381

Sputtering of H+ on Ag(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ag(pc) at 300 K

angle = 0.0 deg E /eV P
88.493.036e-34
102.13.848e-05
117.90.0001969
136.10.0005678
157.10.001276
181.30.002456
209.30.004193
241.60.006446
278.80.00902
321.90.01163
371.50.01401
428.80.01602
495.00.01763
571.30.01889
659.50.01986
761.20.0206
878.70.02115
1014.00.02156
1171.00.02185
1351.00.02203
1560.00.02211
1800.00.0221
2078.00.02201
2399.00.02183
2769.00.02156
3196.00.02122
3689.00.02079
4258.00.0203
4915.00.01973
5673.00.0191
6549.00.01841
7559.00.01768
8725.00.01691
10070.00.0161
11620.00.01527
13420.00.01443
15490.00.01359
17880.00.01275
20640.00.01192
23820.00.0111
27490.00.01031
31730.00.009546
36630.00.008813
42280.00.008114
48800.00.007451
56330.00.006826
65020.00.006238
75060.00.005689
86630.00.005178

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 88.49 – 100000