{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of H+ on Ag(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4315, "q": 0.0568, "mu": 1.957, "epsilonL": 0.0001831, "Eth": 88.49}, "E_min": 88.49, "E_max": 100000} angle = 0.0 deg E /eV P 88.49 3.036e-34 102.1 3.848e-05 117.9 0.0001969 136.1 0.0005678 157.1 0.001276 181.3 0.002456 209.3 0.004193 241.6 0.006446 278.8 0.00902 321.9 0.01163 371.5 0.01401 428.8 0.01602 495.0 0.01763 571.3 0.01889 659.5 0.01986 761.2 0.0206 878.7 0.02115 1014.0 0.02156 1171.0 0.02185 1351.0 0.02203 1560.0 0.02211 1800.0 0.0221 2078.0 0.02201 2399.0 0.02183 2769.0 0.02156 3196.0 0.02122 3689.0 0.02079 4258.0 0.0203 4915.0 0.01973 5673.0 0.0191 6549.0 0.01841 7559.0 0.01768 8725.0 0.01691 10070.0 0.0161 11620.0 0.01527 13420.0 0.01443 15490.0 0.01359 17880.0 0.01275 20640.0 0.01192 23820.0 0.0111 27490.0 0.01031 31730.0 0.009546 36630.0 0.008813 42280.0 0.008114 48800.0 0.007451 56330.0 0.006826 65020.0 0.006238 75060.0 0.005689 86630.0 0.005178 -----