{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"88.49": {"P": 3.036e-34}, "102.1": {"P": 3.848e-05}, "117.9": {"P": 0.0001969}, "136.1": {"P": 0.0005678}, "157.1": {"P": 0.001276}, "181.3": {"P": 0.002456}, "209.3": {"P": 0.004193}, "241.6": {"P": 0.006446}, "278.8": {"P": 0.00902}, "321.9": {"P": 0.01163}, "371.5": {"P": 0.01401}, "428.8": {"P": 0.01602}, "495.0": {"P": 0.01763}, "571.3": {"P": 0.01889}, "659.5": {"P": 0.01986}, "761.2": {"P": 0.0206}, "878.7": {"P": 0.02115}, "1014.0": {"P": 0.02156}, "1171.0": {"P": 0.02185}, "1351.0": {"P": 0.02203}, "1560.0": {"P": 0.02211}, "1800.0": {"P": 0.0221}, "2078.0": {"P": 0.02201}, "2399.0": {"P": 0.02183}, "2769.0": {"P": 0.02156}, "3196.0": {"P": 0.02122}, "3689.0": {"P": 0.02079}, "4258.0": {"P": 0.0203}, "4915.0": {"P": 0.01973}, "5673.0": {"P": 0.0191}, "6549.0": {"P": 0.01841}, "7559.0": {"P": 0.01768}, "8725.0": {"P": 0.01691}, "10070.0": {"P": 0.0161}, "11620.0": {"P": 0.01527}, "13420.0": {"P": 0.01443}, "15490.0": {"P": 0.01359}, "17880.0": {"P": 0.01275}, "20640.0": {"P": 0.01192}, "23820.0": {"P": 0.0111}, "27490.0": {"P": 0.01031}, "31730.0": {"P": 0.009546}, "36630.0": {"P": 0.008813}, "42280.0": {"P": 0.008114}, "48800.0": {"P": 0.007451}, "56330.0": {"P": 0.006826}, "65020.0": {"P": 0.006238}, "75060.0": {"P": 0.005689}, "86630.0": {"P": 0.005178}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4315, "q": 0.0568, "mu": 1.957, "epsilonL": 0.0001831, "Eth": 88.49}, "E_min": 88.49, "E_max": 100000}}]}