pwiDB

Plasma-Surface Interaction Data Set 376

Sputtering of Ne⁺ on Pd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Pd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	15.95	0.0
	19.07	0.0001355
	22.79	0.001016
	27.24	0.003875
	32.56	0.01109
	38.92	0.02665
	46.53	0.05577
	55.62	0.1026
	66.48	0.1667
	79.47	0.2413
	94.99	0.318
	113.6	0.391
	135.7	0.4588
	162.2	0.5225
	193.9	0.5838
	231.8	0.6445
	277.1	0.7057
	331.3	0.7682
	396.0	0.8325
	473.3	0.8988
	565.8	0.9672
	676.3	1.037
	808.4	1.109
	966.3	1.183
	1155.0	1.258
	1381.0	1.333
	1650.0	1.408
	1973.0	1.483
	2358.0	1.557
	2819.0	1.63
	3370.0	1.701
	4028.0	1.768
	4815.0	1.832
	5755.0	1.891
	6880.0	1.945
	8224.0	1.993
	9830.0	2.034
	11750.0	2.067
	14050.0	2.092
	16790.0	2.106
	20070.0	2.111
	23990.0	2.105
	28680.0	2.088
	34280.0	2.059
	40980.0	2.019
	48980.0	1.967
	58550.0	1.906
	69990.0	1.834
	83660.0	1.754

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1449
q = 5.398
mu = 2.341
epsilonL = 1.422e-05
Eth = 15.95

Fit range

E = 15.95 – 100000