{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"15.95": {"P": 0}, "19.07": {"P": 0.0001355}, "22.79": {"P": 0.001016}, "27.24": {"P": 0.003875}, "32.56": {"P": 0.01109}, "38.92": {"P": 0.02665}, "46.53": {"P": 0.05577}, "55.62": {"P": 0.1026}, "66.48": {"P": 0.1667}, "79.47": {"P": 0.2413}, "94.99": {"P": 0.318}, "113.6": {"P": 0.391}, "135.7": {"P": 0.4588}, "162.2": {"P": 0.5225}, "193.9": {"P": 0.5838}, "231.8": {"P": 0.6445}, "277.1": {"P": 0.7057}, "331.3": {"P": 0.7682}, "396.0": {"P": 0.8325}, "473.3": {"P": 0.8988}, "565.8": {"P": 0.9672}, "676.3": {"P": 1.037}, "808.4": {"P": 1.109}, "966.3": {"P": 1.183}, "1155.0": {"P": 1.258}, "1381.0": {"P": 1.333}, "1650.0": {"P": 1.408}, "1973.0": {"P": 1.483}, "2358.0": {"P": 1.557}, "2819.0": {"P": 1.63}, "3370.0": {"P": 1.701}, "4028.0": {"P": 1.768}, "4815.0": {"P": 1.832}, "5755.0": {"P": 1.891}, "6880.0": {"P": 1.945}, "8224.0": {"P": 1.993}, "9830.0": {"P": 2.034}, "11750.0": {"P": 2.067}, "14050.0": {"P": 2.092}, "16790.0": {"P": 2.106}, "20070.0": {"P": 2.111}, "23990.0": {"P": 2.105}, "28680.0": {"P": 2.088}, "34280.0": {"P": 2.059}, "40980.0": {"P": 2.019}, "48980.0": {"P": 1.967}, "58550.0": {"P": 1.906}, "69990.0": {"P": 1.834}, "83660.0": {"P": 1.754}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1449, "q": 5.398, "mu": 2.341, "epsilonL": 1.422e-05, "Eth": 15.95}, "E_min": 15.95, "E_max": 100000}}]}